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Dry release fabrication and testing of SiC electrostatic cantilever actuators

Lookup NU author(s): Mr MA Hussan Hassan, Dr Alun Harris, Emeritus Professor James Burdess


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Publication metadata

Author(s): Jiang L, Hassan M, Cheung R, Harris AJ, Burdess JS, Zorman CA, Mehregany M

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Microelectronic Engineering: 30th International Conference on Micro- and Nano-Engineering

Year of Conference: 2005

Pages: 106-111

: 01679317


Publisher: Elsevier BV


DOI: 10.1016/j.mee.2004.12.015

Library holdings: Search Newcastle University Library for this item

ISBN: 18735568


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