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Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down

Lookup NU author(s): Said Kafumbe, Emeritus Professor James Burdess, Dr Alun Harris

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Publication metadata

Author(s): Kafumbe SMM, Burdess JS, Harris AJ

Publication type: Article

Journal: Journal of Micromechanics and Microengineering

Year: 2005

Volume: 15

Issue: 5

Pages: 1033-1039

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/15/5/020

DOI: 10.1088/0960-1317/15/5/020


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