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A study of boron implantation into high Ge content SiGe alloys

Lookup NU author(s): Dr Suresh Uppal

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Author(s): Wittmann R, Uppal S, Hossinger A, Cervenka J, Selberherr S

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: ECS Transactions: 210th ECS Meeting

Year of Conference: 2006

Pages: 667-676

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Publisher: Electrochemical Society, Inc.

URL: http://dx.doi.org/10.1149/1.2355862

DOI: 10.1149/1.2355862

Library holdings: Search Newcastle University Library for this item

ISBN: 19386737

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