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Diffusion and activation of dopants in silicon and advanced silicon-based materials

Lookup NU author(s): Professor Nick Cowern, Dr Suresh Uppal


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Publication metadata

Author(s): Pichler P, Ortiz CJ, Colombeau B, Cowern NEB, Lampin E, Uppal S, Karunaratne MSA, Bonar JM, Willoughby AFW, Claverie A, Cristiano F, Lerch W, Paul S

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: 21sth Nordic Semiconductor Meeting

Year of Conference: 2006

Pages: 89-96

: 0281-1847

: 0031-8949

Publisher: Physica Scripta T, Kungliga Vetenskapsakademien


DOI: 10.1088/0031-8949/2006/T126/021

Library holdings: Search Newcastle University Library for this item

ISBN: 00318949


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