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Rapid thermal oxidation of Ge-rich Si1-xGex heterolayers

Lookup NU author(s): Goutan Dalapati, Dr Sanatan Chattopadhyay, Dr Yuriy Butenko, Dr Lidija Siller

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Author(s): Bera MK, Chakraborty S, Das R, Dalapati GK, Chattopadhyay S, Samanta SK, Yoo WJ, Chakraborty AK, Butenko Y, Siller L, Hunt MRC, Saha S, Maiti CK

Publication type: Article

Journal: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Year: 2006

Volume: 24

Issue: 1

Pages: 84-90

ISSN (print): 0734-2101

ISSN (electronic): 1071-8028

Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1116/1.2137329

DOI: 10.1116/1.2137329


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