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Ge out-diffusion and its effect on electrical properties in s-Si/SiGe devices

Lookup NU author(s): Dr Suresh Uppal, Dr Mehdi Kanoun, Dr Sanatan Chattopadhyay, Rimoon Agaiby, Dr Sarah Olsen, Professor Steve BullORCiD, Professor Anthony O'Neill

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Author(s): Uppal S, Kanoun M, Chattopadhyay S, Agaiby R, Olsen SH, Bull SJ, O'Neill A

Publication type: Conference Proceedings (inc. Abstract)

Publication status: Published

Conference Name: Materials Research Society Symposium Proceedings: MRS Spring Meeting

Year of Conference: 2006

Pages: 65-70

ISSN: 0272-9172

Publisher: Materials Research Society

Library holdings: Search Newcastle University Library for this item

ISBN: 9781558998681

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