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A focused-ion-beam-fabricated micro-paddle resonator for mass detection

Lookup NU author(s): Dr John Hedley

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Author(s): Boonliang B, Prewett PD, Hedley J, Preece J, Hamlett CA

Publication type: Article

Journal: Journal of Micromechanics and Microengineering

Year: 2008

Volume: 18

Issue: 1

ISSN (print): 0960-1317

ISSN (electronic): 1361-6439

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/18/1/015021

DOI: 10.1088/0960-1317/18/1/015021


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