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Reduced self-heating by strained silicon substrate engineering

Lookup NU author(s): Professor Anthony O'Neill, Rouzet Agaiby, Dr Sarah Olsen, Yang Yang

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Author(s): O'Neill AG, Agaiby R, Olsen S, Yang Y, Hellstrom P-E, Ostling M, Oehme M, Lyutovich K, Kasper E, Eneman G, Verheyen P, Loo R, Claeys C, Fiegna C, Sangiorgi E

Publication type: Article

Journal: Applied Surface Science

Year: 2008

Volume: 254

Issue: 19

Pages: 6182-6185

ISSN (print): 0169-4332

ISSN (electronic): 1873-5584

Publisher: Elsevier BV

URL: http://dx.doi.org/10.1016/j.apsusc.2008.02.172

DOI: 10.1016/j.apsusc.2008.02.172


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