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The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor

Lookup NU author(s): Khamin Ismail, Emeritus Professor James Burdess, Dr Alun Harris, Dr Guillaume Suarez, Dr Neil Keegan, Julia Spoors, Dr Seung Chang, Professor Calum McNeil, Dr John Hedley

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Author(s): Ismail AK, Burdess JS, Harris AJ, Suarez G, Keegan N, Spoors JA, Chang SC, McNeil CJ, Hedley J

Publication type: Article

Journal: Journal of Micromechanics and Microengineering

Year: 2008

Volume: 18

Issue: 2

ISSN (print): 0960-1317

ISSN (electronic): 0960-1317

Publisher: Institute of Physics Publishing Ltd.

URL: http://dx.doi.org/10.1088/0960-1317/18/2/025021

DOI: 10.1088/0960-1317/18/2/025021


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