Lookup NU author(s): Dr Nick Bennett,
Professor Nick Cowern
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Author(s): Bennett N, Cowern N, Bourdelle K, Sealy B
Publication type: Conference Proceedings (inc. Abstract)
Conference Name: International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
Year of Conference: 2009
Sponsor(s): Imago Scientific Instruments, Capres A/S