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Photoacoustic spectroscopy at the nanoscale for ultra-shallow implanted silicon

Lookup NU author(s): Dr Nick Bennett, Professor Nick Cowern

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Publication metadata

Author(s): Horan K, Stopford J, McNally P, Bennett N, Cowern NEB

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Year of Conference: 2009

Publisher: -

Sponsor(s): Imago Scientific Instruments, Capres A/S


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