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Strained Si/strained SiGe/relaxed SiGe structures: identifying roughness due to compressed SiGe and its impact on high mobility MOSFETs

Lookup NU author(s): Dr Enrique Escobedo-Cousin

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Author(s): Escobedo-Cousin E, Olsen SH, O'Neill AG, Alatise OM, Agaiby RMB, Dobrosz P, Braithwaite G, Cuthbertson A, Grasby T, Parker EHC

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Materials REsearch Society Conference (MRS)

Year of Conference: 2007


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