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Material requirements and design considerations for Si/SiGe heterojunction CMOS

Lookup NU author(s): Stephen Badcock, Professor Anthony O'Neill

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Publication metadata

Author(s): Badcock S, O'Neill A

Publication type: Article

Journal: Superlattices and Microstructures

Year: 2000

Volume: 28

Issue: 5-6

Pages: 363-368

ISSN (print): 0749-6036

ISSN (electronic): 1096-3677

Publisher: Academic Press

URL: http://dx.doi.org/10.1006/spmi.2000.0935

DOI: 10.1006/spmi.2000.0935


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