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Fabrication of SiC microelectromechanical systems using one-step dry etching

Lookup NU author(s): Mr MA Hussan Hassan, Dr Alun Harris, Emeritus Professor James Burdess

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Publication metadata

Author(s): Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Journal of Vacuum Science and Technology B: 47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN)

Year of Conference: 2003

Pages: 2998-3001

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Publisher: American Institute of Physics

URL: http://dx.doi.org/10.1116/1.1627804

DOI: 10.1116/1.1627804

Library holdings: Search Newcastle University Library for this item

ISBN: 15208567


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