Toggle Main Menu Toggle Search


Fabrication of SiC microelectromechanical systems using one-step dry etching

Lookup NU author(s): Mr MA Hussan Hassan, Dr Alun Harris, Emeritus Professor James Burdess


Full text for this publication is not currently held within this repository. Alternative links are provided below where available.

Publication metadata

Author(s): Jiang LD, Cheung R, Hassan M, Harris AJ, Burdess JS, Zoman CA, Mehregany M

Publication type: Conference Proceedings (inc. Abstract)

Conference Name: Journal of Vacuum Science and Technology B: 47th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (EIPBN)

Year of Conference: 2003

Pages: 2998-3001



Publisher: American Institute of Physics


DOI: 10.1116/1.1627804

Library holdings: Search Newcastle University Library for this item

ISBN: 15208567


    Link to this publication